XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
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