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AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step

Series AZ3571 & AZ4571 are a Two Step, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated. 

  • Two step mode - metered flow and full open
  • Two separate actuation ports
  • Soft start valve to minimize vacuum chamber pressurization turbulence
  • Metered flow adjustable 
  • Pneumatically actuated normally closed
  • Body material: 316L SS
AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Size Configuration Status
Ports Configuration Status
Connection 1 Configuration Status
Connection 2 Configuration Status
Face to Face Dimension Configuration Status
Metered Flow (slpm)
[10-350]
Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Product Resources
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+1 123-456-7890
+1 123-456-7890